검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
TaSiN thin-film pattern transfer optimization for 200 mm SCALPEL and extreme ultraviolet lithography masks Dauksher WJ, Resnick DJ, Clemens SB, Standfast DL, Masnyj ZS, Wasson JR, Bergmann NM, Han SI, Mangat PJS Journal of Vacuum Science & Technology B, 18(6), 3232, 2000 |