화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 A thermal model for the initiation of programming in metal-to-metal amorphous-silicon antifuses
Vasudevan N, Massoud HZ, Fair RB
Journal of the Electrochemical Society, 146(4), 1536, 1999
2 Heterointerface dipoles : Applications to (a) Si-SiO2, (b) nitrided Si-N-SiO2, and (c) SiC-SiO2 interfaces
Lucovsky G, Yang H, Massoud HZ
Journal of Vacuum Science & Technology B, 16(4), 2191, 1998
3 Wavelength Considerations for Improved Silicon-Wafer Temperature-Measurement by Ellipsometry
Sampson RK, Conrad KA, Massoud HZ, Irene EA
Journal of the Electrochemical Society, 141(2), 539, 1994
4 Substrate Doping and Microroughness Effects in Rtp Temperature-Measurement by in-Situ Ellipsometry
Sampson RK, Conrad KA, Massoud HZ, Irene EA
Journal of the Electrochemical Society, 141(3), 737, 1994
5 Ellipsometric Monitoring and Control of the Rapid Thermal-Oxidation of Silicon
Conrad KA, Sampson RK, Massoud HZ, Irene EA
Journal of Vacuum Science & Technology B, 11(6), 2096, 1993