검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
In situ reaction mechanism studies on the atomic layer deposition of Al2O3 from (CH3)(2)AlCl and water Matero RA, Rahtu A, Ritala M Langmuir, 21(8), 3498, 2005 |
| No. | Article |
|---|---|
| 1 |
In situ reaction mechanism studies on the atomic layer deposition of Al2O3 from (CH3)(2)AlCl and water Matero RA, Rahtu A, Ritala M Langmuir, 21(8), 3498, 2005 |