검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Directly sputtered stress-compensated carbon protective layer for silicon stencil masks Hudek P, Hrkut P, Drzik M, Kostic I, Belov M, Torres J, Wasson J, Wolfe JC, Degen A, Rangelow IW, Voigt J, Butschke J, Letzkus F, Springer R, Ehrmann A, Kaesmaier R, Kragler K, Mathuni J, Haugeneder E, Loschner H Journal of Vacuum Science & Technology B, 17(6), 3127, 1999 |
| 2 |
Thickness Determination of Thin Oxide Layers at the Bottom of Contact Holes of Semiconductor-Devices by Auger-Electron Spectroscopy Pamler W, Mathuni J Journal of Vacuum Science & Technology A, 12(1), 12, 1994 |