화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Image quality improvement in focused ion beam photomask repair system
Yasaka A, Aramaki F, Muramatsu M, Kozakai T, Matsuda O, Sugiyama Y, Doi T, Takaoka O, Hagiwara R, Nakamae K
Journal of Vacuum Science & Technology B, 26(6), 2121, 2008
2 Application of vector scanning in focused ion beam photomask repair system
Yasaka A, Aramaki F, Muramatsu M, Kozakai T, Matsuda O, Sugiyama Y, Doi T, Takaoka O, Hagiwara R, Nakamae K
Journal of Vacuum Science & Technology B, 26(6), 2127, 2008
3 Fabrication and mechanical properties of alpha-Al2O3/beta-Al2O3/Al/Si composites by liquid displacement reaction
Watari T, Torikai T, Tai WP, Matsuda O
Journal of Materials Science, 35(2), 515, 2000