검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of a stainless steel tube resistant to corrosive Cl-2 gas for use in semiconductor manufacturing Ohmi T, Yoshida M, Matudaira Y, Shirai Y, Nakamura O, Gozyuki M, Hashimoto Y Journal of Vacuum Science & Technology B, 16(5), 2789, 1998 |