검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Negative resist image by dry etching as a surface imaging process using focused ion beams Arshak K, Mihov M, Arshak A, McDonagh D, Sutton D, Newcomb SB Journal of Vacuum Science & Technology B, 22(1), 189, 2004 |
| 2 |
Investigations of the Ga+ focused-ion-beam implantation in resist films for nanometer lithography applications Arshak K, Mihov M, Nakahara S, Arshak A, McDonagh D Journal of Vacuum Science & Technology B, 22(6), 3016, 2004 |