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| No. | Article |
|---|---|
| 1 |
Development of pseudorandom binary arrays for calibration of surface profile metrology tools Barber SK, Soldate P, Anderson EH, Cambie R, McKinney WR, Takacs PZ, Voronov DL, Yashchuk VV Journal of Vacuum Science & Technology B, 27(6), 3213, 2009 |