검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Investigation of particle generation during the low-pressure chemical vapor deposition of borophosphosilicate glass films Rao NP, Nijhawan S, Kim T, Wu Z, Campbell S, Kittelson D, McMurry P, Cheng CC, Mastromatteo E Journal of the Electrochemical Society, 145(6), 2051, 1998 |
| 2 |
Investigation of particle formation during the plasma enhanced chemical vapor deposition of amorphous silicon, oxide, and nitride films Rao NP, Wu Z, Nijhawan S, Ziemann P, Campbell S, Kittelson DB, McMurry P Journal of Vacuum Science & Technology B, 16(2), 483, 1998 |
| 3 |
Nanoparticle Formation Using a Plasma Expansion Process Rao N, Girshick S, Heberlein J, Mcmurry P, Jones S, Hansen D, Micheel B Plasma Chemistry and Plasma Processing, 15(4), 581, 1995 |