검색결과 : 13건
| No. | Article |
|---|---|
| 1 |
Templated Electrochemical Synthesis of Titania Nanopillars on Conductive Substrates Chen Y, Park SM, Kim HC, McVittie JP, Ting C, Nish Y Journal of the Electrochemical Society, 157(10), E155, 2010 |
| 2 |
Modeling and simulation of feature-size-dependent etching of metal stacks Abdollahi-Alibeik S, Zheng J, McVittie JP, Saraswat KC, Gabriel CT, Abraham SC Journal of Vacuum Science & Technology B, 19(1), 179, 2001 |
| 3 |
Analysis of injection current through thin gate oxide during metal etch Kinoshita T, Krishnan S, Dostalik WW, McVittie JP Journal of Vacuum Science & Technology B, 19(2), 403, 2001 |
| 4 |
Analytical modeling of silicon etch process in high density plasma Abdollahi-Alibeik S, McVittie JP, Saraswat KC, Sukharev V, Schoenborn P Journal of Vacuum Science & Technology A, 17(5), 2485, 1999 |
| 5 |
Abatement of perfluorocarbons with an inductively coupled plasma reactor Liao MY, Wong K, McVittie JP, Saraswat KC Journal of Vacuum Science & Technology B, 17(6), 2638, 1999 |
| 6 |
Method for angular sputter yield extraction for high-density plasma chemical vapor deposition simulators Kapur P, Bang DS, McVittie JP, Saraswat KC, Mountsier T Journal of Vacuum Science & Technology B, 16(3), 1123, 1998 |
| 7 |
Notching as an Example of Charging in Uniform High-Density Plasmas Kinoshita T, Hane M, Mcvittie JP Journal of Vacuum Science & Technology B, 14(1), 560, 1996 |
| 8 |
Effect of Wafer Temperature During Plasma Exposure on Charging Damage Ma SM, Mcvittie JP Journal of Vacuum Science & Technology B, 14(1), 566, 1996 |
| 9 |
The Effect of the Presheath on the Ion Angular-Distribution at the Wafer Surface Zheng J, Brinkmann RP, Mcvittie JP Journal of Vacuum Science & Technology A, 13(3), 859, 1995 |
| 10 |
Effect of Plasma Overetch of Polysilicon on Gate Oxide Damage Gabriel CT, Mcvittie JP Journal of Vacuum Science & Technology A, 13(3), 900, 1995 |