검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High-Density Plasma-Etching of Compound Semiconductors Shul RJ, Mcclellan GB, Briggs RD, Rieger DJ, Pearton SJ, Abernathy CR, Lee JW, Constantine C, Barratt C Journal of Vacuum Science & Technology A, 15(3), 633, 1997 |
| 2 |
Etching of GaAs/AlGaAs Rib Wave-Guide Structures Using BCl3/Cl-2/N-2/Ar Electron-Cyclotron-Resonance Constantine C, Shul RJ, Sullivan CT, Snipes MB, Mcclellan GB, Hafich M, Fuller CT, Mileham JR, Pearton SJ Journal of Vacuum Science & Technology B, 13(5), 2025, 1995 |