검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Dry-Etching of InGaP in Magnetron Enhanced BCl3 Plasmas Mclane GF, Wood MC, Eckart DW, Lee JW, Lee KN, Pearton SJ, Abernathy CR Journal of Vacuum Science & Technology A, 15(3), 622, 1997 |
| 2 |
Dry-Etching of Germanium in Magnetron Enhanced SF6 Plasmas Mclane GF, Dubey M, Wood MC, Lynch KE Journal of Vacuum Science & Technology B, 15(4), 990, 1997 |
| 3 |
Magnetron Reactive Ion Etching of Group III-Nitride Ternary Alloys Mclane GF, Monahan T, Eckart DW, Pearton SJ, Abernathy CR Journal of Vacuum Science & Technology A, 14(3), 1046, 1996 |
| 4 |
Magnetron Reactive Ion Etching of AlN and Inn in BCl3 Plasmas Mclane GF, Casas L, Lareau RT, Eckart DW, Vartuli CB, Pearton SJ, Abernathy CR Journal of Vacuum Science & Technology A, 13(3), 724, 1995 |
| 5 |
Magnetron Enhanced Reactive Ion Etching of GaAs in CH4/H2/Ar - Surface Damage Study Mclane GF, Buchwald WR, Casas L, Cole MW Journal of Vacuum Science & Technology A, 12(4), 1356, 1994 |
| 6 |
Reactive Ion Etching of Ta-Si-N Diffusion-Barriers in Cf4+o2 Mclane GF, Casas L, Reid JS, Kolawa E, Nicolet MA Journal of Vacuum Science & Technology B, 12(4), 2352, 1994 |