검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Scatterometry measurement of sub-0.1 mu m linewidth gratings Coulombe SA, Minhas BK, Raymond CJ, Naqvi SSH, McNeil JR Journal of Vacuum Science & Technology B, 16(1), 80, 1998 |
| 2 |
Multiparameter Grating Metrology Using Optical Scatterometry Raymond CJ, Murnane MR, Prins SL, Sohail S, Naqvi H, Mcneil JR, Hosch JW Journal of Vacuum Science & Technology B, 15(2), 361, 1997 |
| 3 |
16-Megabit Dynamic Random-Access Memory Trench Depth Characterization Using 2-Dimensional Diffraction Analysis Hatab ZR, Mcneil JR, Naqvi SS Journal of Vacuum Science & Technology B, 13(2), 174, 1995 |
| 4 |
Metrology of Subwavelength Photoresist Gratings Using Optical Scatterometry Raymond CJ, Murnane MR, Naqvi SS, Mcneil JR Journal of Vacuum Science & Technology B, 13(4), 1484, 1995 |
| 5 |
Diffractive Techniques for Lithographic Process Monitoring and Control Naqvi SS, Zaidi SH, Brueck SR, Mcneil JR Journal of Vacuum Science & Technology B, 12(6), 3600, 1994 |