검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Contact etch scaling with contact dimension McNevin SC, Cerullo M Journal of Vacuum Science & Technology A, 16(3), 1514, 1998 |
| 2 |
Diagnosing SiO2 Contact Etch Slap with Optical-Emission Mcnevin SC, Cerullo M Journal of Vacuum Science & Technology A, 15(3), 659, 1997 |
| 3 |
Chemical Challenge of Submicron Oxide Etching Mcnevin SC, Guinn KV, Taylor JA Journal of Vacuum Science & Technology B, 15(2), 214, 1997 |
| 4 |
Optical-Emission Diagnostics for Contact Etching in Applied Materials Centura Hdp 5300 Etcher Guinn K, Tokashiki K, Mcnevin SC, Cerullo N Journal of Vacuum Science & Technology A, 14(3), 1137, 1996 |
| 5 |
The Correlation Between Selective Oxide Etching and Thermodynamic Prediction Mcnevin SC Journal of Vacuum Science & Technology A, 13(3), 797, 1995 |