검색결과 : 1건
No. | Article |
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1 |
Copper device editing: Strategy for focused ion beam milling of copper Casey JD, Phaneuf M, Chandler C, Megorden M, Noll KE, Schuman R, Gannon TJ, Krechmer A, Monforte D, Antoniou N, Bassom N, Li J, Carleson P, Huynh C Journal of Vacuum Science & Technology B, 20(6), 2682, 2002 |