검색결과 : 30건
| No. | Article |
|---|---|
| 1 |
Low Stress Polycrystalline SiC Thin Films Suitable for MEMS Applications Fu XA, Dunning JL, Mehregany M, Zorman CA Journal of the Electrochemical Society, 158(6), H675, 2011 |
| 2 |
Electromechanical Computing at 500 degrees C with Silicon Carbide Lee TH, Bhunia S, Mehregany M Science, 329(5997), 1316, 2010 |
| 3 |
Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition Fu XA, Dunning JL, Zorman CA, Mehregany M Thin Solid Films, 492(1-2), 195, 2005 |
| 4 |
Surface roughness control of 3C-SiC films during the epitaxial growth process Fu XA, Zorman CA, Mehregany M Journal of the Electrochemical Society, 151(12), G910, 2004 |
| 5 |
Development of a high-throughput LPCVD process for depositing low stress poly-SiC Fu XA, Dunning J, Zorman CA, Mehregany M Materials Science Forum, 457-460, 305, 2004 |
| 6 |
Advanced processing techniques for silicon carbide MEMS and NEMS Zorman CA, Mehregany M Materials Science Forum, 457-460, 1451, 2004 |
| 7 |
Young's modulus and residual stress of polycrystalline 3C-SiC films grown by LPCVD and measured by the load-deflection technique Fu XA, Dunning J, Zorman CA, Mehregany M Materials Science Forum, 457-460, 1519, 2004 |
| 8 |
Characterization of polycrystalline SiC thin films for MEMS applications using surface micromachined devices Dunning J, Fu XA, Rajgopal S, Mehregany M, Zorman CA Materials Science Forum, 457-460, 1523, 2004 |
| 9 |
Fabrication of suspended nanomechanical structures from bulk 6H-SiC substrates Huang XMH, Feng XL, Prakash MK, Kumar S, Zorman CA, Mehregany M, Roukes ML Materials Science Forum, 457-460, 1531, 2004 |
| 10 |
Fabrication of SiC microelectromechanical systems using one-step dry etching Jiang LD, Cheung R, Hassan M, Harris AJ, Burdess JS, Zoman CA, Mehregany M Journal of Vacuum Science & Technology B, 21(6), 2998, 2003 |