검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Improving electron beam resist sensitivity by preexposure to deep ultraviolet radiation Murali R, Brown D, Martin KP, Meindl JD Journal of Vacuum Science & Technology B, 25(6), 2064, 2007 |
| 2 |
Modeling the effect of source/drain junction depth on bulk-MOSFET scaling Murali R, Meindl JD Solid-State Electronics, 51(6), 823, 2007 |
| 3 |
Process optimization and proximity effect correction for gray scale e-beam lithography Murali R, Brown DK, Martin KP, Meindl JD Journal of Vacuum Science & Technology B, 24(6), 2936, 2006 |
| 4 |
Fringe-induced barrier lowering (FIBL) included threshold voltage model for double-gate MOSFETs Chen Q, Wang LH, Meindl JD Solid-State Electronics, 49(2), 271, 2005 |
| 5 |
Physical Limits on Gigascale Integration Meindl JD Journal of Vacuum Science & Technology B, 14(1), 192, 1996 |