검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Thin-film resistor fabrication for InP technology applications Kopf RF, Melendes R, Jacobson DC, Tate A, Melendes MA, Reyes RR, Hamm RA, Yang Y, Frackoviak J, Weimann NG, Maynard HL, Liu CT Journal of Vacuum Science & Technology B, 20(3), 871, 2002 |
| 2 |
Highly Selective Reactive Ion Etch Process for InP-Based Device Fabrication Using Methane Hydrogen Argon Schramm JE, Hu EL, Merz JL, Brown JJ, Melendes MA, Thompson MA, Brown AS Journal of Vacuum Science & Technology B, 11(6), 2280, 1993 |
| 3 |
Micromachining in III-V Semiconductors Using Wet Photoelectrochemical Etching Khare R, Hu EL, Brown JJ, Melendes MA Journal of Vacuum Science & Technology B, 11(6), 2497, 1993 |