검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effects of Electron-Cyclotron-Resonance Power and Cavity Dimensions in Plasma-Etching of III-V Compounds Melville DL, Thompson DA, Simmons JG Journal of the Electrochemical Society, 142(8), 2762, 1995 |
| 2 |
Identification of Volatile Products in Low-Pressure Hydrocarbon Electron-Cyclotron-Resonance Reactive Ion Etching of InP and GaAs Melville DL, Simmons JG, Thompson DA Journal of Vacuum Science & Technology B, 11(6), 2038, 1993 |