검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Reactive ion etching induced damage evaluation for optoelectronic device fabrication Morello G, Quaglio M, Meneghini G, Papuzza C, Kompocholis C Journal of Vacuum Science & Technology B, 24(2), 756, 2006 |
| 2 |
Theoretical discussion of diffusion effects in negative chemically amplified resists based on contrast curve simulation Patsis GP, Meneghini G, Glezos N, Argitis P Journal of Vacuum Science & Technology B, 15(6), 2561, 1997 |