검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors Stolz CJ, Wolfe JE, Mirkarimi PB, Folta JA, Adams JJ, Menor MG, Teslich NE, Soufli R, Menoni CS, Patel D Thin Solid Films, 592, 216, 2015 |
| 2 |
Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers Wachulak PW, Capeluto MG, Marconi MC, Patel D, Menoni CS, Rocca JJ Journal of Vacuum Science & Technology B, 25(6), 2094, 2007 |
| 3 |
X-ray characterization of oriented beta-tantalum films Kohli S, McCurdy PR, Rithner CD, Dorhout PK, Dummer AM, Brizuela F, Menoni CS Thin Solid Films, 469-470, 404, 2004 |