검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Superhigh-Rate Epitaxial Silicon Thick Film Deposition from Trichlorosilane by Mesoplasma Chemical Vapor Deposition Wu SD, Kambara M, Yoshida T Plasma Chemistry and Plasma Processing, 33(2), 433, 2013 |
| No. | Article |
|---|---|
| 1 |
Superhigh-Rate Epitaxial Silicon Thick Film Deposition from Trichlorosilane by Mesoplasma Chemical Vapor Deposition Wu SD, Kambara M, Yoshida T Plasma Chemistry and Plasma Processing, 33(2), 433, 2013 |