검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High selectivity Inductively Coupled Plasma etching of GaAs over InGaP Hays DC, Cho H, Lee JW, Devre MW, Reelfs BH, Johnson D, Sasserath JN, Meyer LC, Toussaint E, Ren F, Abernathy CR, Pearton SJ Applied Surface Science, 156(1-4), 76, 2000 |
| 2 |
Study of NH3 plasma damage on GaAs Schottky diode in inductively coupled plasma system Meyer LC, Lee JW, Johnson D, Huang M, Ren F, Anderson TJ, LaRoche JR, Lothian JR, Abernathy CR, Pearton SJ Journal of the Electrochemical Society, 146(7), 2717, 1999 |