화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Precision resistor integration into a submicron silicided complementary metal oxide semiconductor technology
Miles GL, Grellner F, Jamison PC
Journal of the Electrochemical Society, 147(8), 3078, 2000
2 Total-Reflection X-Ray-Fluorescence Analysis of Planarized Semiconductor Product Wafers
Lavoie MA, Adams ED, Miles GL
Journal of Vacuum Science & Technology A, 14(3), 1924, 1996
3 TiSi2 Phase-Transformation Characteristics on Narrow Devices
Miles GL, Mann RW, Bertsch JE
Thin Solid Films, 290-291, 469, 1996