검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Silica film preparation by chemical vapor deposition using vacuum ultraviolet excimer lamps Kurosawa K, Takezoe N, Yanagida H, Miyano J, Motoyama Y, Toshikawa K, Kawasaki Y, Yokotani A Applied Surface Science, 168(1-4), 37, 2000 |
| 2 |
Rugged Surface Polycrystalline Silicon Film Deposition and Its Application in a Stacked Dynamic Random-Access Memory Capacitor Electrode Ino M, Miyano J, Kurogi H, Tamura H, Nagatomo Y, Yoshimaru M Journal of Vacuum Science & Technology B, 14(2), 751, 1996 |