검색결과 : 1건
No. | Article |
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1 |
Evidence for the Appearance of Carbon-Rich Layer at the Interface of SiC Film Si Substrate Sonoda N, Sun Y, Miyasato T Journal of Vacuum Science & Technology A, 15(1), 18, 1997 |
No. | Article |
---|---|
1 |
Evidence for the Appearance of Carbon-Rich Layer at the Interface of SiC Film Si Substrate Sonoda N, Sun Y, Miyasato T Journal of Vacuum Science & Technology A, 15(1), 18, 1997 |