검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Improvement in the passivation quality of catalytic-chemical-vapor-deposited silicon nitride films on crystalline Si at room temperature Miyaura J, Ohdaira K Thin Solid Films, 674, 103, 2019 |
| No. | Article |
|---|---|
| 1 |
Improvement in the passivation quality of catalytic-chemical-vapor-deposited silicon nitride films on crystalline Si at room temperature Miyaura J, Ohdaira K Thin Solid Films, 674, 103, 2019 |