검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Scale-up approach for industrial plasma enhanced chemical vapor deposition processes and SiOx thin film technology Jin SB, Lee JS, Choi YS, Choi IS, Han JG, Hori M Thin Solid Films, 547, 193, 2013 |
| No. | Article |
|---|---|
| 1 |
Scale-up approach for industrial plasma enhanced chemical vapor deposition processes and SiOx thin film technology Jin SB, Lee JS, Choi YS, Choi IS, Han JG, Hori M Thin Solid Films, 547, 193, 2013 |