검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Properties of thermally annealed ruthenium thin films grown on seed layers in a low-temperature selective deposition region Vasilyev VY, Mogilnikov KP, Song YW Current Applied Physics, 9(2), E148, 2009 |
| 2 |
Surface Selective Growth of Ruthenium Films under Low-Temperature Pulsed CVD Conditions Vasilyev VY, Mogilnikov KP, Song YW Electrochemical and Solid State Letters, 11(12), D89, 2008 |
| 3 |
Nucleation and Growth of Pulsed CVD Ru Films from Tricarbonyl[eta(4)-cyclohexa-1,3-diene]ruthenium Vasilyev VY, Mogilnikov KP, Song YW Journal of the Electrochemical Society, 155(12), D763, 2008 |
| 4 |
Structural characterization of mesoporous organosilica films for ultralow-k dielectrics de Theije FK, Balkenende AR, Verheijen MA, Baklanov MR, Mogilnikov KP, Furukawa Y Journal of Physical Chemistry B, 107(18), 4280, 2003 |
| 5 |
Determination of Young's modulus of porous low-k films by ellipsometric porosimetry Mogilnikov KP, Baklanov MR Electrochemical and Solid State Letters, 5(12), F29, 2002 |
| 6 |
Determination of pore size distribution in thin films by ellipsometric porosimetry Baklanov MR, Mogilnikov KP, Polovinkin VG, Dultsev FN Journal of Vacuum Science & Technology B, 18(3), 1385, 2000 |