검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Experimental study of Cr/Sc multilayer mirrors for the nitrogen K-alpha-emission line Hardouin A, Delmotte F, Ravet MF, Bridou F, Jerome A, Varniere F, Montcalm C, Hedacq S, Gullikson E, Aubert P Journal of Vacuum Science & Technology A, 26(3), 333, 2008 |
| 2 |
Multilayer coating and test of the optics for two new 10X Microstepper extreme-ultraviolet lithography cameras Montcalm C, Spiller E, Weber FJ, Wedowski M, Folta JA, Gullikson EM Journal of Vacuum Science & Technology B, 19(4), 1219, 2001 |
| 3 |
Ultrahigh-Vacuum Deposition Reflectometer System for the in-Situ Investigation of Y/Mo Extreme-Ultraviolet Multilayer Mirrors Montcalm C, Sullivan BT, Ranger M, Pepin H Journal of Vacuum Science & Technology A, 15(6), 3069, 1997 |