검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etching of organic low dielectric constant material SiLK (TM) on the Lam Research Corporation 4520XLE (TM) Janowiak C, Ellingboe S, Morey I Journal of Vacuum Science & Technology A, 18(4), 1859, 2000 |
| No. | Article |
|---|---|
| 1 |
Etching of organic low dielectric constant material SiLK (TM) on the Lam Research Corporation 4520XLE (TM) Janowiak C, Ellingboe S, Morey I Journal of Vacuum Science & Technology A, 18(4), 1859, 2000 |