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| No. | Article |
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| 1 |
Two stage ion beam figuring and smoothening method for shape error correction of ULE (R) substrates of extreme ultraviolet lithography projection optics: Evaluation of high-spatial frequency roughness Kamijo K, Uozumi R, Moriziri K, Pahlovy SA, Miyamoto I Journal of Vacuum Science & Technology B, 27(6), 2900, 2009 |