검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Point of Use HF Purification for Silicon Surface Preparation by Ion-Exchange Fyen W, Mouche L, Meuris M, Heyns MM Journal of the Electrochemical Society, 144(6), 2189, 1997 |
| 2 |
Light Point-Defect Generation During Photoresist Spin-Coating - Characterization and Controlling Parameters Mouche L, Meuris M, Heyns MM Journal of the Electrochemical Society, 144(10), 3608, 1997 |
| 3 |
Mechanisms of Metallic Impurity Deposition on Silicon Substrates Dipped in Cleaning Solution Mouche L, Tardif F, Derrien J Journal of the Electrochemical Society, 142(7), 2395, 1995 |
| 4 |
Particle Deposition on Silicon-Wafers During Wet Cleaning Processes Mouche L, Tardif F, Derrien J Journal of the Electrochemical Society, 141(6), 1684, 1994 |