검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ultrashallow profiling using secondary ion mass spectrometry: Estimating junction depth error using mathematical deconvolution Yang MH, Mount G, Mowat I Journal of Vacuum Science & Technology B, 24(1), 428, 2006 |
| 2 |
Characterization of profiling techniques for ultralow energy arsenic implants Kasnavi R, Sun Y, Mount G, Pianetta P, Griffin PB, Plummer JD Electrochemical and Solid State Letters, 4(1), G1, 2001 |