검색결과 : 1건
No. | Article |
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1 |
Differential surface-charge-induced damage of dielectrics and leakage kinetics during plasma processing Abatchev MK, Murali SK Electrochemical and Solid State Letters, 9(1), F1, 2006 |
No. | Article |
---|---|
1 |
Differential surface-charge-induced damage of dielectrics and leakage kinetics during plasma processing Abatchev MK, Murali SK Electrochemical and Solid State Letters, 9(1), F1, 2006 |