| 1 |
Highly c-axis oriented AlN layers grown on c-plane sapphire substrates by radio-frequency sputter epitaxy at 1080 degrees C
Mutsukura N, Shinoda H
Thin Solid Films, 520(13), 4237, 2012 |
| 2 |
Structural properties of GaN and related alloys grown by radio-frequency magnetron sputter epitaxy
Shinoda H, Mutsukura N
Thin Solid Films, 516(10), 2837, 2008 |
| 3 |
Structural and optical properties of InN films prepared by radio frequency magnetron sputtering
Shinoda H, Mutsukura N
Thin Solid Films, 503(1-2), 8, 2006 |
| 4 |
Synthesis of epitaxial GaN single-crystalline film by ultra high vacuum r.f. magnetron sputtering method
Daigo Y, Mutsukura N
Thin Solid Films, 483(1-2), 38, 2005 |
| 5 |
Deposition of diamond-like carbon film in a closed-space CH4 RF plasma
Mutsukura N, Handa Y
Plasma Chemistry and Plasma Processing, 22(4), 607, 2002 |
| 6 |
Deposition of diamondlike carbon film and mass spectrometry measurement in CH4/N-2 RF plasma
Mutsukura N
Plasma Chemistry and Plasma Processing, 21(2), 265, 2001 |
| 7 |
Deposition of diamond-like carbon film and mass spectrometry measurement in CH4/O-2 RF plasma
Tanaka K, Mutsukura N
Plasma Chemistry and Plasma Processing, 19(2), 217, 1999 |
| 8 |
Infrared absorption spectroscopy measurements of amorphous CNx films prepared in CH4/N-2 r.f. discharge
Mutsukura N, Akita K
Thin Solid Films, 349(1-2), 115, 1999 |
| 9 |
Temperature-Dependence of A-C-H Film Deposition in a CH4 Radio-Frequency Plasma
Mutsukura N, Saitoh K
Journal of Vacuum Science & Technology A, 14(4), 2666, 1996 |
| 10 |
Diagnostics and Control of Radiofrequency Glow-Discharge
Mutsukura N, Fukasawa Y, Machi Y, Kubota T
Journal of Vacuum Science & Technology A, 12(6), 3126, 1994 |
