검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
A Comparative-Study of CH4 and CF4 RF Discharges Using a Consistent Plasma Physics and Chemistry Simulator Mantzaris NV, Gogolides E, Boudouvis AG Plasma Chemistry and Plasma Processing, 16(3), 301, 1996 |
| 2 |
Electron-Spin-Resonance and Theoretical-Studies of the Po2 and Aso2 Radicals in Neon Matrices at 4 K - Laser Vaporization and X-Irradiation Radical Generation Techniques Knight LB, Jones GC, King GM, Babb RM, Mckinley AJ Journal of Chemical Physics, 103(2), 497, 1995 |
| 3 |
Diagnostics and Control of Radicals in an Inductively-Coupled Etching Reactor Sugai H, Nakamura K, Hikosaka Y, Nakamura M Journal of Vacuum Science & Technology A, 13(3), 887, 1995 |