검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of silicon oxynitride thin films by x-ray photoelectron spectroscopy Shallenberger JR, Cole DA, Novak SW Journal of Vacuum Science & Technology A, 17(4), 1086, 1999 |
| 2 |
Monolayer-level controlled incorporation of nitrogen at Si-SiO2 interfaces using remote plasma processing Niimi H, Lucovsky G Journal of Vacuum Science & Technology A, 17(6), 3185, 1999 |