화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Ultraviolet irradiation on hydrogenated amorphous carbon films deposited by atmospheric dielectric barrier discharge
Kugimiya T, Kannaka M, Yokomizo M, Nakaue A, Takamatsu H
Journal of the Electrochemical Society, 153(5), C282, 2006
2 N channel metal-oxide-semiconductor field-effect transistor with 0.15 mu m gate delineated by focused ion beam lithography
Suzuki K, Yamashita M, Kawakami N, Nakaue A
Journal of Vacuum Science & Technology B, 15(6), 2342, 1997
3 Sub-100 nm Focused Ion-Beam Lithography Using Ladder Silicone Spin-on Glass
Suzuki K, Yamashita M, Kawakami N, Yoshikawa A, Nakaue A
Journal of Vacuum Science & Technology B, 14(6), 3916, 1996
4 Focused Ion-Beam Optical-Merged Lithographic Technique Using Ladder Silicone Spin-on Glass
Suzuki K, Kinoshita T, Yamashita M, Kawakami N, Nakaue A
Journal of Vacuum Science & Technology B, 13(6), 2593, 1995