검색결과 : 4건
No. | Article |
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1 |
Ultraviolet irradiation on hydrogenated amorphous carbon films deposited by atmospheric dielectric barrier discharge Kugimiya T, Kannaka M, Yokomizo M, Nakaue A, Takamatsu H Journal of the Electrochemical Society, 153(5), C282, 2006 |
2 |
N channel metal-oxide-semiconductor field-effect transistor with 0.15 mu m gate delineated by focused ion beam lithography Suzuki K, Yamashita M, Kawakami N, Nakaue A Journal of Vacuum Science & Technology B, 15(6), 2342, 1997 |
3 |
Sub-100 nm Focused Ion-Beam Lithography Using Ladder Silicone Spin-on Glass Suzuki K, Yamashita M, Kawakami N, Yoshikawa A, Nakaue A Journal of Vacuum Science & Technology B, 14(6), 3916, 1996 |
4 |
Focused Ion-Beam Optical-Merged Lithographic Technique Using Ladder Silicone Spin-on Glass Suzuki K, Kinoshita T, Yamashita M, Kawakami N, Nakaue A Journal of Vacuum Science & Technology B, 13(6), 2593, 1995 |