검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reduction of long range fogging effect in a high acceleration voltage electron beam mask writing system Ogasawara M, Shimomura N, Takamatsu J, Yoshitake S, Ooki K, Nakayamada N, Okabe H, Tojo T, Takigawa T Journal of Vacuum Science & Technology B, 17(6), 2936, 1999 |