검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
ILD CMP with Silica Abrasive Particles: Interfacial Removal Kinetics and Effect of Pad Surface Textures Li ST, Gaudet G, Sun F, Naman A Journal of the Electrochemical Society, 157(11), H1061, 2010 |
| 2 |
Effect of porosity and adhesion promoter layer on adhesion energy of nanoporous inorganic low-kappa Damayanti M, Gan ZH, Sritharan T, Mhaisalkar SG, Naman A, Widodo J, Tan HS Thin Solid Films, 504(1-2), 213, 2006 |
| 3 |
Morphology of TiSi2 Films on Si Formed from Co-Deposited Ti and Si Herner SB, Krishnamoorthy V, Naman A, Jones KS, Gossmann HJ, Tung RT Thin Solid Films, 302(1-2), 127, 1997 |