| 1 |
Dc self-bias voltages in radio frequency magnetron discharges
Yonemura S, Nanbu K
Thin Solid Films, 506, 517, 2006 |
| 2 |
Coulomb collisions in materials processing plasmas
Nanbu K, Furubayashi T, Takekida H
Thin Solid Films, 506, 720, 2006 |
| 3 |
Particle modeling of non-collisional heating in inductively coupled argon plasmas
Takekida H, Nanbu K
Thin Solid Films, 506, 729, 2006 |
| 4 |
A fast solution method for the Poisson equation in simulating the direct current and radio frequency discharges
Nanbu K, Tong LZ
Thin Solid Films, 506, 734, 2006 |
| 5 |
Surface activated bonding of LCP/Cu for electronic packaging
Howlader M, Suga T, Takahashi A, Saijo K, Ozawa S, Nanbu K
Journal of Materials Science, 40(12), 3177, 2005 |
| 6 |
Coupling of plasma and flow in materials processing
Shiozawa M, Nanbu K
Thin Solid Films, 457(1), 48, 2004 |
| 7 |
Axisymmetrical particle-in-cell/Monte Carlo simulation of narrow gap planar magnetron plasmas. I. Direct current-driven discharge
Kondo S, Nanbu K
Journal of Vacuum Science & Technology A, 19(3), 830, 2001 |
| 8 |
Axisymmetrical particle-in-cell/Monte Carlo simulation of narrow gap planar magnetron plasmas. II. Radio frequency-driven discharge
Kondo S, Nanbu K
Journal of Vacuum Science & Technology A, 19(3), 838, 2001 |
| 9 |
Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion-neutral reactive collisions
Denpoh K, Nanbu K
Journal of Vacuum Science & Technology A, 16(3), 1201, 1998 |
| 10 |
Monte-Carlo Numerical-Analysis of Target Erosion and Film Growth in a 3-Dimensional Sputtering Chamber
Serikov VV, Nanbu K
Journal of Vacuum Science & Technology A, 14(6), 3108, 1996 |
