검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces Marra DC, Edelberg EA, Naone RL, Aydil ES Journal of Vacuum Science & Technology A, 16(6), 3199, 1998 |
| No. | Article |
|---|---|
| 1 |
Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces Marra DC, Edelberg EA, Naone RL, Aydil ES Journal of Vacuum Science & Technology A, 16(6), 3199, 1998 |