검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Hydrogen Reduction of MoF6 and Molybdenum Carbide Formation in RF Inductively Coupled Low-Pressure Discharge: Experiment and Equilibrium Thermodynamics Consideration Sennikov PG, Gornushkin IB, Kornev RA, Nazarov VV, Polyakov VS, Shkrunin VE Plasma Chemistry and Plasma Processing, 41(2), 673, 2021 |