검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of resist surface characteristics on film-pulling velocity in immersion lithography Schuetter S, Shedd T, Nellis G, Romano A, Dammel R, Padmanaban M, Houlihan F, Krawicz A, Lin G, Rahman D, Chakrapani S, Neisser M, Van Peski C Journal of Vacuum Science & Technology B, 24(6), 2798, 2006 |
| 2 |
Lithographic Evaluation of the Hydrogenated Amorphous-Carbon Film Martino R, Ferguson R, Molless A, Liebmann L, Neisser M, Weed J, Callegari S Journal of Vacuum Science & Technology B, 13(6), 2949, 1995 |