검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Surface chemistry and optimization of focused ion beam iodine-enhanced etching of indium phosphide Callegari V, Nellen PM, Yang TH, Hauert R, Muller U, Hernandez-Ramirez F, Sennhauser U Applied Surface Science, 253(22), 8969, 2007 |
| 2 |
Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystals Callegari V, Nellen PM, Kaufmann J, Strasser P, Robin F Journal of Vacuum Science & Technology B, 25(6), 2175, 2007 |