검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Computer modeling as a tool to predict deposition rate and film composition in the reactive sputtering process Berg S, Nyberg T, Blom HO, Nender C Journal of Vacuum Science & Technology A, 16(3), 1277, 1998 |
| 2 |
Composition central by current modulation in dc-reactive sputtering Nyberg T, Nender C, Berg S Journal of Vacuum Science & Technology A, 16(3), 1868, 1998 |
| 3 |
In-Situ Diagnostic Studies of Reactive Cosputtering from 2 Targets by Means of Soft-X-Ray and Optical-Emission Spectroscopy Nyberg T, Skytt P, Galnander B, Nender C, Nordgren J, Berg S Journal of Vacuum Science & Technology A, 15(1), 145, 1997 |
| 4 |
Studies of Reactive Sputtering of Multiphase Chromium Nitride Nyberg T, Skytt P, Galnander B, Nender C, Nordgren J, Berg S Journal of Vacuum Science & Technology A, 15(2), 248, 1997 |
| 5 |
Hysteresis Effects in the Sputtering Process Using 2 Reactive Gases Barankova H, Berg S, Carlsson P, Nender C Thin Solid Films, 260(2), 181, 1995 |
| 6 |
Large-Area Selective Thin-Film Deposition by Bias Sputtering Berg S, Katardjiev IV, Nender C, Carlsson P Thin Solid Films, 241(1-2), 1, 1994 |