검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Optimization of thin, nitrogen-rich silicon oxynitrides grown by rapid thermal nitridation Ludsteck A, Schulze J, Eisele I, Dietl W, Chung H, Nenyei Z, Bergmaier A, Dollinger G Journal of the Electrochemical Society, 152(5), G334, 2005 |
| 2 |
Non-destructive probing of interfacial oxidation and nitridation states at RTP Si-oxides Hoffmann P, Schmeisser D, Roters G, Nenyei Z Thin Solid Films, 428(1-2), 216, 2003 |