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| No. | Article |
|---|---|
| 1 |
High-throughput electron-beam lithography with a raster-scanned, variably shaped beam Veneklasen LH, Kao HM, Rishton SA, Winter S, Boegli V, Newman T, Bertuccelli G, Howard G, Le P, Tan Z, Lozes R Journal of Vacuum Science & Technology B, 19(6), 2455, 2001 |