검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of macroscopic uniformity during CH4/H-2 reactive ion etching of InP and its improvement by use of a guard ring Janiak K, Niggebrugge U Journal of Vacuum Science & Technology B, 20(1), 105, 2002 |
| No. | Article |
|---|---|
| 1 |
Investigation of macroscopic uniformity during CH4/H-2 reactive ion etching of InP and its improvement by use of a guard ring Janiak K, Niggebrugge U Journal of Vacuum Science & Technology B, 20(1), 105, 2002 |